LaTiOxNy Thin Films, Measurement and Application to Microwave Device

Author

Kassem, Hussein ; Ziani, Ahmed ; Vigneras, Valerie ; Lunet, G. ; Le Paven-Thivet, C. ; Le Gendre, L. ; Tessier, Franck

Author_Institution

IMS-Bordeaux Lab., Univ. of Bordeaux, Bordeaux

fYear

2008

fDate

27-31 Oct. 2008

Firstpage

1362

Lastpage

1365

Abstract

This paper reports about three issues: a non-destructive method for dielectric measurement of materials; the first microwave dielectric measurement of a new birth dielectric LaTiO_xN_y material, and a topology for X-band phase shifter based on tuneable ferroelectric thin films interdigital capacitors.

Keywords

barium compounds; dielectric materials; dielectric measurement; ferroelectric capacitors; ferroelectric thin films; lanthanum compounds; microwave materials; microwave measurement; microwave phase shifters; sulphur compounds; thin film capacitors; Ba_0.6S_0.4TiO₃; LaTiO_xN_y; X-band phase shifter; dielectric material; interdigital capacitors; microwave device; microwave dielectric measurement; nondestructive method; tuneable ferroelectric thin films; Dielectric materials; Dielectric measurements; Dielectric thin films; Ferroelectric materials; Magnetic materials; Microwave theory and techniques; Permittivity; Thin film devices; Transmission line measurements; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2008. EuMC 2008. 38th European

Conference_Location

Amsterdam

Print_ISBN

978-2-87487-006-4

Type

conf

DOI

10.1109/EUMC.2008.4751717

Filename

4751717