DocumentCode
2377576
Title
Determination of IC interconnect line parameters by S-parameter measurements
Author
Eisenstadt, W.R. ; Eo, Y.
Author_Institution
Florida Univ., Gainesville, FL, USA
fYear
1991
fDate
11-12 Jun 1991
Firstpage
356
Lastpage
358
Abstract
A procedure for extracting distributed transmission-line circuit parameters from S-parameter measurements of a microstrip has been developed. A methodology for extracting model parameters from these measurements is presented. The model is valid from 45 MHz to 18 GHz. Horizontal layout and cross sections are reported and extraction results are reviewed
Keywords
S-parameters; VLSI; integrated circuit technology; metallisation; microwave measurement; 45 MHz to 18 GHz; IC interconnect line parameters; S-parameter measurements; VLSI; circuits; cross sections; horizontal layout; microstrip; transmission-line circuit parameters; Circuit simulation; Circuit testing; Data mining; Electrical resistance measurement; Frequency; Impedance; Integrated circuit interconnections; Microstrip; Scattering parameters; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Multilevel Interconnection Conference, 1991, Proceedings., Eighth International IEEE
Conference_Location
Santa Clara, CA
Print_ISBN
0-87942-673-X
Type
conf
DOI
10.1109/VMIC.1991.153024
Filename
153024
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