Title :
Determination of IC interconnect line parameters by S-parameter measurements
Author :
Eisenstadt, W.R. ; Eo, Y.
Author_Institution :
Florida Univ., Gainesville, FL, USA
Abstract :
A procedure for extracting distributed transmission-line circuit parameters from S-parameter measurements of a microstrip has been developed. A methodology for extracting model parameters from these measurements is presented. The model is valid from 45 MHz to 18 GHz. Horizontal layout and cross sections are reported and extraction results are reviewed
Keywords :
S-parameters; VLSI; integrated circuit technology; metallisation; microwave measurement; 45 MHz to 18 GHz; IC interconnect line parameters; S-parameter measurements; VLSI; circuits; cross sections; horizontal layout; microstrip; transmission-line circuit parameters; Circuit simulation; Circuit testing; Data mining; Electrical resistance measurement; Frequency; Impedance; Integrated circuit interconnections; Microstrip; Scattering parameters; Very large scale integration;
Conference_Titel :
VLSI Multilevel Interconnection Conference, 1991, Proceedings., Eighth International IEEE
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-87942-673-X
DOI :
10.1109/VMIC.1991.153024
