Title :
Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications
Author :
Beyeler, F. ; Muntwyler, S. ; Nelson, B.J.
Author_Institution :
ETH Zurich, Zurich, Switzerland
Abstract :
This work describes the design of a capacitive multi-axis force-torque sensor for the monitoring of forces in the sub-milli-Newton and sub-micro-Newtonmeter range. This force range makes it a valuable tool for microrobotic applications. The sensor is experimentally investigated and calibrated. This is the first microfabricated 6-axis force-torque sensor that has been successfully developed.
Keywords :
calibration; force sensors; microfabrication; micromanipulators; torque control; MEMS; calibration; capacitive multiaxis force-torque sensor; microfabricated 6-axis force-torque sensor design; micromanipulation; microrobotic application; Atomic force microscopy; Biosensors; Calibration; Capacitive sensors; Capacitors; Force measurement; Force sensors; Magnetic sensors; Sensor phenomena and characterization; Torque;
Conference_Titel :
Robotics and Automation, 2009. ICRA '09. IEEE International Conference on
Conference_Location :
Kobe
Print_ISBN :
978-1-4244-2788-8
Electronic_ISBN :
1050-4729
DOI :
10.1109/ROBOT.2009.5152253
