Title :
High reliability internal capacitor of LTCC
Author :
Baba, Yasuyuki ; Ochi, Hiroshi ; Segawa, Shigetoshi
Author_Institution :
Matsushita-Kotobuki Electron. Ind. Ltd., Saijo, Japan
Abstract :
This paper discusses the internal capacitor of LTCC. It includes the material study, manufacturing process, electronic properties, and reliability of internal capacitors. After these studies, high reliability internal capacitor is developed and the results make this technology closer to real applications
Keywords :
capacitors; integrated circuit packaging; integrated circuit reliability; multichip modules; LTCC; MCMs; electronic properties; internal capacitor; low temperature co-fired ceramic; manufacturing process; reliability; Capacitors; Conductive films; Conductors; Dielectric materials; Electrodes; Manufacturing processes; Powders; Printing; Substrates; Temperature;
Conference_Titel :
Electronic Components and Technology Conference, 1994. Proceedings., 44th
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-0914-6
DOI :
10.1109/ECTC.1994.367614
