Title :
BioMEMS and microfluidics applications of surface micromachining technology
Author :
Okandan, Murat ; Galambos, Paul ; Mani, Sita ; Jakubczak, Jay
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
In the last decade, examples of devices manufactured with SUMMiT technology have demonstrated the capabilities of polysilicon surface micromachining. Currently we are working on enhancements to this technology to enable Microfluidics and BioMEMS. The goal is to ultimately provide functionality that is not feasible with other microfabrication technologies. The enhancements build on the key features of surface micromachining: manufacturability and compatibility with CMOS processing, and allow us to leverage the investment already made in the microelectronics processing technology
Keywords :
biotechnology; microfluidics; micromachining; micromechanical devices; BioMEMS; CMOS processing; SUMMiT technology; Si; microfabrication; microfluidics; polysilicon surface micromachining; Biomembranes; CMOS technology; Electrodes; Manufacturing; Microfluidics; Micromachining; Micromechanical devices; Silicon on insulator technology; Stress; Valves;
Conference_Titel :
Microelectromechanical Systems Conference, 2001
Conference_Location :
Berkeley, CA
Print_ISBN :
0-7803-7224-7
DOI :
10.1109/MEMSC.2001.992727
