Title :
Motorola MEMS switch technology for high frequency applications
Author :
De Silva, A.P. ; Vaughan, C. ; Frear, D. ; Liu, L. ; Kuo, S.M. ; Foerstner, J. ; Drye, J. ; Abrokwah, J. ; Hughes, H. ; Amrine, C. ; Butler, C. ; Markgraf, S. ; Denton, H. ; Springer, S.
Author_Institution :
Motorola Semicond. Product Sector, Tempe, AZ, USA
Abstract :
Motorola Semiconductor Products Sector (SPS) has made significant progress in developing an integrated MEMS switch network for use in next-generation portable wireless systems. This MEMS switch technology has significantly better RF characteristics than conventional PIN diodes or FET switches and consumes less power. The RF MEMS switch exhibits insertion loss under 0.3 dB, isolation greater than 50 dB, and operating power under 200 μW. The RF MEMS switch chip is integrated with a high voltage charge pump plus control logic chips into a single package that provides a network system to accommodate low voltage requirements in portable wireless applications
Keywords :
integrated circuit technology; micromechanical devices; microwave switches; mobile radio; radio equipment; semiconductor device packaging; semiconductor switches; FET switches; MEMS switch chip package; MEMS switch technology; Motorola MEMS switch technology; PIN diodes; RF MEMS switch chip; RF characteristics; control logic chips; high frequency applications; high voltage charge pump; insertion loss; integrated MEMS switch network; isolation; low voltage requirements; network system; operating power; portable wireless applications; portable wireless systems; power consumption; Charge pumps; FETs; Insertion loss; Isolation technology; Microswitches; Next generation networking; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems; Voltage control;
Conference_Titel :
Microelectromechanical Systems Conference, 2001
Conference_Location :
Berkeley, CA
Print_ISBN :
0-7803-7224-7
DOI :
10.1109/MEMSC.2001.992733
