Title :
Thermoelectric semiconductor and electrode-fabrication and evaluation of SiGe/electrode
Author :
Hasezaki, K. ; Tsukuda, H. ; Yamada, A. ; Nakajima, S. ; Kang, Y. ; Niino, M.
Author_Institution :
Res. & Dev. Center, Mitsubishi Heavy Ind. Ltd., Nagasaki, Japan
Abstract :
Joints between a silicon-germanium thermoelectric semiconductor and electrodes were prepared by hot-pressing. Tungsten or carbon electrodes were joined to either side of n-type Si0.8Ge0.2 (P 0.3 at.%) respectively, with thin sheets of titanium foil inserted between them, and then pressed and joined at 1523 K in vacuum. The size of the resulting electrode/SiGe semiconductor/electrode units measured 5 mm× 5 mm×9 mm. Observations through SEM and EPMA showed the presence of many voids in the junction layers of the SiGe/tungsten electrodes, whereas the SiGe/carbon electrodes exhibited no voids in their junction layers. In the SiGe/carbon electrodes, the titanium atoms were enriched in the junction layer, and other atoms also remained undiffused. In the SiGe/tungsten electrodes, the tungsten and silicon atoms showed counter diffusion. Resistance and Seebeck coefficient of the carbon/SiGe/carbon electrodes were measured in the temperature range from 600 to 1100 K. Resistance ranged from 0.012 to 0.015 Ω, and the Seebeck coefficient from 200×10-6 to 250×10-6 V/K. To evaluate the upper limit of heating dependence, the carbon/SiGe/carbon electrodes were exposed in an argon atmosphere at 1273 K and 1373 K for 300 hours. After exposure testing, SEM observation showed the presence of many voids in the junction layer of the SiGe/carbon electrode, which had not previously shown any voids either at the stage of joining by hot-pressing or exposure at 1273 K
Keywords :
Ge-Si alloys; Seebeck effect; carbon; diffusion; electric resistance; electrodes; electron probe analysis; hot pressing; scanning electron microscopy; semiconductor materials; semiconductor-metal boundaries; thermoelectric conversion; tungsten; voids (solid); 0.012 to 0.015 ohm; 1273 K; 1373 K; 1523 K; 300 h; 5 mm; 600 to 1100 K; 9 mm; C-Si0.8Ge0.2-C; EPMA; SEM; Seebeck coefficient; SiGe/electrode; Ti; W-Si0.8Ge0.2-W; argon atmosphere; carbon electrodes; counter diffusion; electrode-fabrication; exposure testing; heating dependence; hot-pressing; junction layers; n-type Si0.8Ge0.2; resistance; thermoelectric semiconductor fabrication; titanium atoms; titanium foil; tungsten electrodes; voids; Atomic layer deposition; Atomic measurements; Electrodes; Germanium silicon alloys; Measurement units; Silicon germanium; Temperature measurement; Thermoelectricity; Titanium; Tungsten;
Conference_Titel :
Thermoelectrics, 1997. Proceedings ICT '97. XVI International Conference on
Conference_Location :
Dresden
Print_ISBN :
0-7803-4057-4
DOI :
10.1109/ICT.1997.667602