Innovation pathways for microsystem technologies

Microsystem (MST) or microelectromechanical system (MEMS) technology is an area of research and development which is focused on the miniaturization of systems which contain both electronic and nonelectronic components. There are substantial technical barriers to be overcome. From the perspective of the MST technologist the main technical barrier is to understand the engineering requirements of host systems, and, more narrowly, to understand them as defining technical constraints on acceptable microsystem applications. This paper is an attempt to define a framework for the discussion and analysis of these issues