X-ray lithography sources: a review

It is pointed out that synchrotron radiation from dipole magnets in electron storage rings has emerged as a useful source of X-rays for lithography. To meet the need for these sources numerous groups around the world have embarked on projects to design and construct storage rings for X-ray lithography. Both conventional electromagnets and superconducting (SC) dipoles have been incorporated into the various designs. An overview of the worldwide effort to produce commercial X-ray sources is presented. To better illustrate the elements involved in these sources, a closer examination of the Superconducting X-ray Lithography Source Project (SXLS) at Brookhaven National Laboratory is presented