• DocumentCode
    237883
  • Title

    Microwave substrate loss tangent extraction from coplanar Waveguide Measurements up to 125 GHz

  • Author

    Arz, Uwe

  • Author_Institution
    Phys.-Tech. Bundesanstalt (PTB), Braunschweig, Germany
  • fYear
    2014
  • fDate
    6-6 June 2014
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We present a semi-numerical method to extract the loss tangent of a low-loss microwave substrate material from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. We demonstrate the method using test structures built on a SiO2 wafer for frequencies up to 125 GHz.
  • Keywords
    S-parameters; coplanar waveguides; dielectric loss measurement; dielectric materials; microwave materials; microwave measurement; numerical analysis; silicon compounds; SiO2; coplanar waveguide measurement; low-loss microwave dielectric substrate material; microwave substrate loss tangent extraction; on-wafer scattering-parameter measurement; seminumerical method; structure testing; Conductivity; Coplanar waveguides; Loss measurement; Microwave measurement; Permittivity; Permittivity measurement; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Measurement Conference (ARFTG), 2014 83rd ARFTG
  • Conference_Location
    Tampa, FL
  • Type

    conf

  • DOI
    10.1109/ARFTG.2014.6899532
  • Filename
    6899532
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=237883