Title :
Application of boundary conditioning to the synthesis of microsystems
Author :
Muthukumaran, P. ; Stiharu, I. ; Bhat, R.B.
Author_Institution :
Dept. of Mech. Eng., Concordia Univ., Montreal, Que., Canada
Abstract :
This paper presents and applies the concept of micro-boundary conditioning to the design synthesis of microsystems in order to quantify the influence of non-classical support conditions on both static and dynamic behavior of microsystems
Keywords :
micromechanical devices; boundary conditioning; design synthesis; microsystems technology; Boundary conditions; Fabrication; Frequency; Laboratories; Mechanical engineering; Microelectromechanical devices; Microelectronics; Micromachining; Micromechanical devices; Springs;
Conference_Titel :
Microelectromechanical Systems Conference, 2001
Conference_Location :
Berkeley, CA
Print_ISBN :
0-7803-7224-7
DOI :
10.1109/MEMSC.2001.992748
