DocumentCode
2378860
Title
Application of boundary conditioning to the synthesis of microsystems
Author
Muthukumaran, P. ; Stiharu, I. ; Bhat, R.B.
Author_Institution
Dept. of Mech. Eng., Concordia Univ., Montreal, Que., Canada
fYear
2001
fDate
2001
Firstpage
83
Lastpage
86
Abstract
This paper presents and applies the concept of micro-boundary conditioning to the design synthesis of microsystems in order to quantify the influence of non-classical support conditions on both static and dynamic behavior of microsystems
Keywords
micromechanical devices; boundary conditioning; design synthesis; microsystems technology; Boundary conditions; Fabrication; Frequency; Laboratories; Mechanical engineering; Microelectromechanical devices; Microelectronics; Micromachining; Micromechanical devices; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectromechanical Systems Conference, 2001
Conference_Location
Berkeley, CA
Print_ISBN
0-7803-7224-7
Type
conf
DOI
10.1109/MEMSC.2001.992748
Filename
992748
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