Design and analysis of a micro reciprocating engine for the time multiplexed deep etching process

This paper presents the design and evaluation of the micro reciprocating engine for deep etching micro fabrication. Energy densities of different fuels have been investigated in the research. It shows that combustive fuels can possess energy up to 179 times higher than a Li-S battery. A novel reciprocating engine has been designed, taking into count the 2D feature of time multiplexed deep etching process. The microengine is constructed in two layers. The cross sections of both the piston and the combustion chamber are rectangular. The engine parts have undergone vigorous numerical analysis. The maximum von Mises stresses on the piston-pin unit and the cylinder have been identified to ensure they are well away from the fracture stress of silicon. Meanwhile, the deformations of the parts have been identified for estimating their contributions to the mechanism and leakage of the engine. Calculations have been carried out through the whole stroke cycle to find the maximum stress and deformation of each part. Computer assembly and animation, together with FEA, indicate that the design is valid. The research will be followed by engine fabrication