Title :
Calculation of deflection and mechanical stresses in plates of the rectangular form by variational and numerical methods
Author :
Gridchin, Victor A. ; Shaporin, Alexey V. ; Byalik, Alexander D. ; Lee, John H.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Russia
Abstract :
The influence of tensile and compression in-plane stresses of silicon plate have been investigated. The cases of square and rectangular form of elastic element have been considered. It was shown, that in-plane stresses can have a great influence on plate deflection and stresses distributions, that should be taken into account at designing of piezoresistive pressure sensors
Keywords :
finite element analysis; stress analysis; variational techniques; Si; deflection; elastic element; finite element method; mechanical stress; numerical method; piezoresistive pressure sensor; rectangular plate; variational method; Equations; Finite difference methods; Lattices; Mechanical sensors; Microelectronics; Moment methods; Piezoresistance; Semiconductor devices; Silicon; Tensile stress;
Conference_Titel :
Science and Technology, 2000. KORUS 2000. Proceedings. The 4th Korea-Russia International Symposium on
Conference_Location :
Ulsan
Print_ISBN :
0-7803-6486-4
DOI :
10.1109/KORUS.2000.866028
