Title :
Simulation of multibeam acoustic waves interference in plane-parallel coatings for MEMS
Author :
Kosoboutskyy, P. ; Lizanets, D. ; Lobur, M.
Author_Institution :
Dept. of Comput. Aided Design Syst., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
In the first part of the work the regularities of the envelope functions of the aplitude-phase spectra of the Fabry-Perot multiple-beam interference for acoustic wave are generalized. Basic physical principles extending the possibilities of the envelope function method for the determination of structure parameters are formulated.
Keywords :
acoustic wave effects; coatings; interference (signal); micromechanical devices; Fabry-Perot multiple beam interference; MEMS; aplitude phase spectra; multibeam acoustic waves interference; plane parallel coating; Acoustic waves; Electromagnetic scattering; Fabry-Perot; Interference; Media; Optics; Fabry-Perot interference; antireflection; envelope function;
Conference_Titel :
Microwaves, Radar, and Wireless Communication (MIKON), 2014 20th International Conference on
Conference_Location :
Gdansk
Print_ISBN :
978-617-607-553-0
DOI :
10.1109/MIKON.2014.6899887
