DocumentCode
238038
Title
Simulation of multibeam acoustic waves interference in plane-parallel coatings for MEMS
Author
Kosoboutskyy, P. ; Lizanets, D. ; Lobur, M.
Author_Institution
Dept. of Comput. Aided Design Syst., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2014
fDate
16-18 June 2014
Firstpage
1
Lastpage
4
Abstract
In the first part of the work the regularities of the envelope functions of the aplitude-phase spectra of the Fabry-Perot multiple-beam interference for acoustic wave are generalized. Basic physical principles extending the possibilities of the envelope function method for the determination of structure parameters are formulated.
Keywords
acoustic wave effects; coatings; interference (signal); micromechanical devices; Fabry-Perot multiple beam interference; MEMS; aplitude phase spectra; multibeam acoustic waves interference; plane parallel coating; Acoustic waves; Electromagnetic scattering; Fabry-Perot; Interference; Media; Optics; Fabry-Perot interference; antireflection; envelope function;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwaves, Radar, and Wireless Communication (MIKON), 2014 20th International Conference on
Conference_Location
Gdansk
Print_ISBN
978-617-607-553-0
Type
conf
DOI
10.1109/MIKON.2014.6899887
Filename
6899887
Link To Document