Title :
Application of USM to micromachining by on-the-machine tool fabrication
Author :
Egashira, Kai ; Masuzawa, Takahisa ; Fujino, Masatoshi ; Sun, Xi-Qing
Author_Institution :
The University of Tokyo
Keywords :
Ceramics; Fabrication; Glass; Machining; Magnetic heads; Micromachining; Silicon; Soldering; Ultrasonic transducers; Wire;
Conference_Titel :
Science and Technology, 2000. KORUS 2000. Proceedings. The 4th Korea-Russia International Symposium on
Print_ISBN :
0-7803-6486-4
DOI :
10.1109/KORUS.2000.866068
