Title :
Survey of semiconductor process-induced damage
Keywords :
Computer aided manufacturing; Design engineering; Integrated circuit layout; Integrated circuit manufacture; Integrated circuit reliability; Manufacturing processes; Plasma applications; Plasma devices; Plasma materials processing; Reliability engineering;
Conference_Titel :
Plasma- and Process-Induced Damage, 2002 7th International Symposium on
Print_ISBN :
0-9651577-7-6
DOI :
10.1109/PPID.2002.1042637
