Title :
Fabrication and characterization of electrokinetic micro pumps
Author :
Zeng, Shulin ; Chen, Chuan-Hua ; Mikkelsen, James C., Jr. ; Santiago, Juan C.
Author_Institution :
Dept. of Mech. Eng., Stanford Univ., CA, USA
Abstract :
Electrokinetic (EK) micropumps have been fabricated and demonstrated in which electroosmotic flow is used to transport fluids. Deionized water and pure acetonitrile have been used as working fluids to achieve low current density pumping conditions. These EK pumps have no moving parts and can generate maximum pressures of more than 20 atm at 2 kV applied voltage. Minimizing and controlling electrolytic gas generation is a major concern. Gas generated at the downstream electrode surfaces appears to be forced to dissolve into surrounding fluid at high pressure (>7 atm) condition, and this permits a stable pump operation. Measurements of flow rate have been used to estimate pump structure parameters
Keywords :
cooling; electrophoresis; integrated circuit packaging; microfluidics; micropumps; osmosis; thermal management (packaging); 2 kV; 20 atm; MEMS; deionized water; electrokinetic micro pumps; electrolytic gas generation minimisation; electroosmotic flow; low current density pumping conditions; microelectronic cooling systems; micropump characterization; micropump fabrication; pump structure parameters; pure acetonitrile; stable pump operation; two-phase cooling; working fluids; Current density; Electrodes; Electrokinetics; Fabrication; Fluid flow control; Fluid flow measurement; Micropumps; Parameter estimation; Pumps; Voltage;
Conference_Titel :
Thermal and Thermomechanical Phenomena in Electronic Systems, 2000. ITHERM 2000. The Seventh Intersociety Conference on
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-7803-5912-7
DOI :
10.1109/ITHERM.2000.866167
