Title :
A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers
Author :
Jiangfeng Wu ; Fedder, G.K. ; Carley, L.R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
A CMOS chopper-stabilized amplifier with both DC and AC offset cancellation, for capacitive readout of motion in MEMS structures, achieves 40 nV//spl radic/HZ noise floor, 10 mV DC offset, and 40 dB sensor offset reduction. The amplifier, integrated into a CMOS-MEMS accelerometer, achieves 50 /spl mu/g//spl radic/Hz noise floor.
Keywords :
CMOS analogue integrated circuits; accelerometers; amplifiers; capacitive sensors; choppers (circuits); integrated circuit noise; microsensors; readout electronics; AC offset cancellation; CMOS low-noise chopper-stabilized amplifier; DC offset cancellation; MEMS accelerometer; capacitive readout; motion sensor; noise floor; Accelerometers; Capacitance; Capacitive sensors; Circuit noise; Low-noise amplifiers; MOSFETs; Micromechanical devices; Noise cancellation; Signal to noise ratio; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7335-9
DOI :
10.1109/ISSCC.2002.993115
