DocumentCode
2383111
Title
Beam-astigmatism in laser interferometry
Author
Cordiali, L. ; Mana, G. ; Cavagnero, G. ; Bergamin, A.
Author_Institution
CNR, Torino, Italy
fYear
1996
fDate
17-21 June 1996
Firstpage
130
Lastpage
131
Abstract
We developed a null laser interferometer capable of 10 /spl mu/rad resolution in fringe division for the measurement of the silicon
Keywords
Gaussian distribution; X-ray applications; aberrations; constants; elemental semiconductors; lattice constants; light diffraction; light interferometry; measurement by laser beam; probability; silicon; CCD image sensor; Gaussian distribution; Si; X-ray interferometry; diffraction; fringe division; laser interferometry; measurement uncertainty; null laser interferometer; wavefront astigmatism; Displacement measurement; Interference; Laser beams; Lattices; Optical interferometry; Optical sensors; Silicon; Vision defects; X-ray diffraction; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 1996 Conference on
Conference_Location
Braunschweig, Germany
Print_ISBN
0-7803-3376-4
Type
conf
DOI
10.1109/CPEM.1996.546652
Filename
546652
Link To Document