Title :
Silicon based electret relays
Author :
Ichiya, Mitsuo ; NISHIMURA, Hiromi ; Kasano, Fumishiro ; Lewiner, Jacques ; Perino, Didier
Author_Institution :
Matsushita Electr. Works. Ltd., Osaka, Japan
Abstract :
In this paper we present a new family of integrated electret relays, the various parts of them being made by micromachining of silicon wafers. Ageing curves of electrets which are directly made on the silicon substrates will be shown, and new mechanical designs will be described
Keywords :
ageing; electrets; electrostatic devices; elemental semiconductors; micromachining; semiconductor relays; semiconductor-insulator boundaries; silicon; silicon compounds; Si; Si based electret relays; Si wafers; Si-SiO2; SiO2 electrets; ageing curves; integrated electret relays; mechanical designs; micromachining; Aging; Electrets; Electrodes; Electromagnetic forces; Electrostatics; Iron; Relays; Silicon; Substrates; Voltage;
Conference_Titel :
Electrets, 1994. (ISE 8), 8th International Symposium on
Conference_Location :
Paris
Print_ISBN :
0-7803-1940-0
DOI :
10.1109/ISE.1994.515254
