DocumentCode
2383520
Title
Advantages of electrostatic micromotor and its application to medical instruments
Author
Xinli, Wang ; Shumei, Cui ; Shukang, Cheng
Author_Institution
Dept. of Electr. Eng., Harbin Inst. of Technol., China
Volume
4
fYear
2002
fDate
13-18 Oct. 2002
Firstpage
2466
Abstract
In this paper, electrostatic micromotor and conventional electromagnetic micromotor are compared. According to their different operation principles, the paper firstly analyzes the scaling effect of driving forces. Characteristic dimension L represents the linear scale of the micromotors. Electromagnetic driving force is proportional to high-order power of characteristic dimension L whereas electrostatic driving force is not. So, in micro domain, the effect of electrostatic force is larger than that of electromagnetic force, which makes electrostatic micromotor more competitive against electromagnetic alternative in MEMS. In assessing the performance of the micromotor, the power per unit volume and efficiency are the two most important criteria. Hence, the paper further compares the two kinds of micromotors from these two aspects. The results indicate that electrostatic micromotor has higher power per unit volume and efficiency, moreover, its structure is simple, it can be made sufficiently small. For those advantages of electrostatic micromotor, the paper finally discusses its application to medical instruments.
Keywords
biomedical equipment; electromagnetic forces; electrostatic motors; MEMS; conventional electromagnetic; driving forces effect; efficiency; electromagnetic driving force; electromagnetic force; electrostatic force; electrostatic micromotor; high-order power; medical instruments; micro domain; operation principles; power per unit volume; Conductors; Electrodes; Electromagnetic analysis; Electromagnetic forces; Electrostatics; Instruments; Microactuators; Micromechanical devices; Micromotors; Stator cores;
fLanguage
English
Publisher
ieee
Conference_Titel
Industry Applications Conference, 2002. 37th IAS Annual Meeting. Conference Record of the
Conference_Location
Pittsburgh, PA, USA
ISSN
0197-2618
Print_ISBN
0-7803-7420-7
Type
conf
DOI
10.1109/IAS.2002.1042792
Filename
1042792
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