Title :
Solid state electret microphones
Author :
Roizin, Ya.O. ; Vasilenko, V. ; Komarov, S.
Author_Institution :
Dept. of Noncrystalline Electron. Syst., Odessa State Univ., Ukraine
Abstract :
A novel solid state electret microphone is proposed in this paper. The distinguishing feature of this device compared with analogous subminiature microphones is application of silicon frames, silicon membranes and inorganic silicon based electret layers. The proposed microphones are made using micromechanical and microelectronical techniques already employed in fabrication of static pressure sensors. Charging of the electret layer is performed after the complete fabrication of the microphone chip
Keywords :
electrets; elemental semiconductors; integrated circuits; micromechanical devices; microphones; silicon; silicon compounds; Si; Si frames; Si membranes; electret layer charging; inorganic Si based electret layers; microelectronical techniques; micromechanical; solid state electret microphones; Biomembranes; Electrets; Etching; Fabrication; Frequency; Micromechanical devices; Microphones; Silicon compounds; Solid state circuits; Wafer bonding;
Conference_Titel :
Electrets, 1994. (ISE 8), 8th International Symposium on
Conference_Location :
Paris
Print_ISBN :
0-7803-1940-0
DOI :
10.1109/ISE.1994.515261
