Title :
Miniaturized inorganic electret layers
Author :
Thielemann, C. ; Amjadi, H. ; Sapieha, J. Klemberg ; Martinu, L. ; Wertheimer, M.R.
Author_Institution :
Inst. for Telecommun. & Electroacoust., Tech. Univ. Darmstadt, Germany
Abstract :
Silicon dioxide and nitride based materials are interesting inorganic electrets for applications in the field of micromechanics and sensor technologies since they are compatible to the silicon technology. It was the motivation for this work to find new suitable electret materials with good mechanical properties for the application in a micromachined electret condenser microphone. SiO2, Si3 N4 single and double layers and SiON layers are investigated in terms of chargeability and long-term charge-stability. The main emphasis is put on the miniaturization of electret layers. The lateral dimensions of the electrets are reduced down to 2 mm and the characteristics under different environmental conditions are described
Keywords :
electrets; insulating thin films; micromachining; microphones; silicon compounds; 2 mm; Si3N4; SiO2; SiON; chargeability; lateral dimensions; long-term charge-stability; micromechanics; miniaturized inorganic electret layers; sensor technologies; Biomembranes; Compressive stress; Electrets; Inorganic materials; Mechanical sensors; Microphones; Plasma temperature; Silicon; Stability; Tensile stress;
Conference_Titel :
Electrets, 1994. (ISE 8), 8th International Symposium on
Conference_Location :
Paris
Print_ISBN :
0-7803-1940-0
DOI :
10.1109/ISE.1994.515265
