DocumentCode
2385938
Title
Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)
fYear
2000
fDate
26-28 Sept. 2000
Abstract
The following topics are dealt with: manufacturing strategy and management; 300mm fab operation; manufacturing control and execution; process and metrology equipment; material optimization; environmental issues; process optimization; yield modeling and defect reduction
Keywords
environmental factors; integrated circuit manufacture; integrated circuit measurement; integrated circuit modelling; integrated circuit testing; integrated circuit yield; optimisation; process control; 300 mm; defect reduction; environmental issues; fab operation; management; manufacturing control; manufacturing strategy; material optimization; metrology equipment; process equipment; process optimization; yield modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Conference_Location
Tokyo, Japan
ISSN
1523-553X
Print_ISBN
0-7803-7392-8
Type
conf
DOI
10.1109/ISSM.2000.993603
Filename
993603
Link To Document