Recent topics of micro and nano mechatronics

This paper focuses on the recent topics of micro and nano mechatronics. A nano laboratory-a prototype nano manufacturing system based on nanorobotlic manipulation-is presented for enabling nanotube-based micro- and nanomechatronics, such as microhano sensors and actuators, bioapplications and nano-robotics applications. Deflection of cantilevered individual nanotubes based mass flow sensors, field emission of a cantilevered nanotube based approaching sensor, dual cantilevered nanotubes based thermal probes, and telescoping motion based nanotube linear bearings and our preliminary works on actuators are reviewed.