Title :
Charging regimes of insulators under low energy electron beam (200 eV to 10 keV)
Author :
Blaise, G. ; Braga, D.
Author_Institution :
Lab. de Phys. des Solides, Univ. de Paris-Sud, Orsay, France
Abstract :
Charging properties of insulators are investigated with a SEM by measuring the amount of trapped charges and the SEE yield δ as a function of current density J and dose D, in a wide energy range 200 eV - 10 keV. Three stationary charging regimes (self-regulation, ageing, degradation) depending on J have been identified.
Keywords :
ageing; current density; electron beam effects; insulating materials; insulators; scanning electron microscopy; secondary electron emission; static electrification; 200 eV to 10 keV; SEE yield; SEM; ageing; current density; degradation; dose; insulators; low energy electron beam; secondary electron emission yield; self-regulation; stationary charging regimes; trapped charges; Current density; Current measurement; Density measurement; Detectors; Electron beams; Electron emission; Electron traps; Energy measurement; Insulation; Scanning electron microscopy;
Conference_Titel :
Electrets, 2002. ISE 11. Proceedings. 11th International Symposium on
Print_ISBN :
0-7803-7560-2
DOI :
10.1109/ISE.2002.1042933
