DocumentCode :
2386041
Title :
Ring oscillator based embedded structure for decoupling PMOS/NMOS degradation with switching activity replication
Author :
Ahmed, Fahad ; Milor, Linda
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear :
2010
fDate :
22-25 March 2010
Firstpage :
118
Lastpage :
121
Abstract :
Until recently, negative bias temperature instability (NBTI) has been regarded as the primary reliability concern. However, with the introduction of high-k metal gate stacks, positive bias temperature instability (PBTI) has gradually become equally important. Conventional ring oscillator based structures monitor the delay/frequency through an inverter chain to track the PMOS threshold voltage (Vt) degradation due to NBTI, with the assumption of zero degradation in the NMOS device. Therefore these structures lose their effectiveness in the presence of PBTI. In this work, we propose a ring oscillator based test structure that isolates the Vt degradation in the PMOS device and the NMOS device, hence permitting simultaneous monitoring of both. We also introduce a switching activity replication scheme for more accurate prediction of degradation in actual data paths.
Keywords :
MOSFET; oscillators; switching; PMOS/NMOS degradation; decoupling; embedded structure; high-k metal gate stacks; negative bias temperature instability; positive bias temperature instability; primary reliability concern; ring oscillator; switching activity replication; Degradation; Delay; High K dielectric materials; High-K gate dielectrics; MOS devices; Monitoring; Negative bias temperature instability; Niobium compounds; Ring oscillators; Titanium compounds; Data Paths; NBTI; PBTI; Switching Activity Replication;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on
Conference_Location :
Hiroshima
Print_ISBN :
978-1-4244-6912-3
Electronic_ISBN :
978-1-4244-6914-7
Type :
conf
DOI :
10.1109/ICMTS.2010.5466845
Filename :
5466845
Link To Document :
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