DocumentCode
2386041
Title
Ring oscillator based embedded structure for decoupling PMOS/NMOS degradation with switching activity replication
Author
Ahmed, Fahad ; Milor, Linda
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2010
fDate
22-25 March 2010
Firstpage
118
Lastpage
121
Abstract
Until recently, negative bias temperature instability (NBTI) has been regarded as the primary reliability concern. However, with the introduction of high-k metal gate stacks, positive bias temperature instability (PBTI) has gradually become equally important. Conventional ring oscillator based structures monitor the delay/frequency through an inverter chain to track the PMOS threshold voltage (Vt) degradation due to NBTI, with the assumption of zero degradation in the NMOS device. Therefore these structures lose their effectiveness in the presence of PBTI. In this work, we propose a ring oscillator based test structure that isolates the Vt degradation in the PMOS device and the NMOS device, hence permitting simultaneous monitoring of both. We also introduce a switching activity replication scheme for more accurate prediction of degradation in actual data paths.
Keywords
MOSFET; oscillators; switching; PMOS/NMOS degradation; decoupling; embedded structure; high-k metal gate stacks; negative bias temperature instability; positive bias temperature instability; primary reliability concern; ring oscillator; switching activity replication; Degradation; Delay; High K dielectric materials; High-K gate dielectrics; MOS devices; Monitoring; Negative bias temperature instability; Niobium compounds; Ring oscillators; Titanium compounds; Data Paths; NBTI; PBTI; Switching Activity Replication;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on
Conference_Location
Hiroshima
Print_ISBN
978-1-4244-6912-3
Electronic_ISBN
978-1-4244-6914-7
Type
conf
DOI
10.1109/ICMTS.2010.5466845
Filename
5466845
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