• DocumentCode
    2386041
  • Title

    Ring oscillator based embedded structure for decoupling PMOS/NMOS degradation with switching activity replication

  • Author

    Ahmed, Fahad ; Milor, Linda

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2010
  • fDate
    22-25 March 2010
  • Firstpage
    118
  • Lastpage
    121
  • Abstract
    Until recently, negative bias temperature instability (NBTI) has been regarded as the primary reliability concern. However, with the introduction of high-k metal gate stacks, positive bias temperature instability (PBTI) has gradually become equally important. Conventional ring oscillator based structures monitor the delay/frequency through an inverter chain to track the PMOS threshold voltage (Vt) degradation due to NBTI, with the assumption of zero degradation in the NMOS device. Therefore these structures lose their effectiveness in the presence of PBTI. In this work, we propose a ring oscillator based test structure that isolates the Vt degradation in the PMOS device and the NMOS device, hence permitting simultaneous monitoring of both. We also introduce a switching activity replication scheme for more accurate prediction of degradation in actual data paths.
  • Keywords
    MOSFET; oscillators; switching; PMOS/NMOS degradation; decoupling; embedded structure; high-k metal gate stacks; negative bias temperature instability; positive bias temperature instability; primary reliability concern; ring oscillator; switching activity replication; Degradation; Delay; High K dielectric materials; High-K gate dielectrics; MOS devices; Monitoring; Negative bias temperature instability; Niobium compounds; Ring oscillators; Titanium compounds; Data Paths; NBTI; PBTI; Switching Activity Replication;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on
  • Conference_Location
    Hiroshima
  • Print_ISBN
    978-1-4244-6912-3
  • Electronic_ISBN
    978-1-4244-6914-7
  • Type

    conf

  • DOI
    10.1109/ICMTS.2010.5466845
  • Filename
    5466845