A next queue algorithm in real time dispatching system of semiconductor manufacturing

Author

Chen, Ying-Jen ; Yu, Gary ; Huang, Kuo-Sung ; Wang, Ivan

Author_Institution

MACRONIX Int. Co. Ltd., Hsinchu, Taiwan

fYear

2000

fDate

2000

Firstpage

67

Lastpage

70

Abstract

We demonstrate a next-queue rule in the real time dispatcher developed in MXIC FAB I. The outline of this system is presented first, then, the dispatching rule design logic is described. The real time dispatching system makes lot-dispatching work easy for operators. A next queue algorithm was developed in the implementation of the real time dispatcher. Finally, it has been proved that the dispatching algorithm not only improves FAB utilization but also reduces cycle time. Implementation of the real time dispatching system keeps reducing of cycle time and improves tool utilization by 7% from Q2 1999 to now

Keywords

integrated circuit manufacture; process control; production control; FAB utilization; MXIC FAB I; cycle time reduction; dispatching algorithm; dispatching rule design logic; lot-dispatching work; next queue algorithm; real time dispatching system; semiconductor manufacturing; tool utilization; Databases; Dispatching; Etching; Ion implantation; Lithography; Logic design; Manufacturing industries; Production; Real time systems; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on

Conference_Location

Tokyo

ISSN

1523-553X

Print_ISBN

0-7803-7392-8

Type

conf

DOI

10.1109/ISSM.2000.993618

Filename

993618