Title :
Automated micro-assembly of surface MEMS mirrors by centrifugal force
Author :
Lai, K.W.C. ; Chung, P.S. ; Ming Li ; Li, W.J.
Abstract :
very fast, low-cost, and reliable method to assemble micro structures suitable for MOEMS (micro-opto-electro-mechanical systems) applications is reported in this paper. In general, due to the minute scale of MEMS devices, inertia force is often neglected when dealing with MEMS components. However, we have demonstrated that inertia force can be significant even if the mass of micro structure is \n\n\t\t
Keywords :
Assembly systems; Force sensors; Friction; Laboratories; Microelectromechanical devices; Micromechanical devices; Mirrors; Packaging; Structural discs; Thin film sensors;
Conference_Titel :
Intelligent Mechatronics and Automation, 2004. Proceedings. 2004 International Conference on
Conference_Location :
Chengdu, China
Print_ISBN :
0-7803-8748-1
DOI :
10.1109/ICIMA.2004.1384156
