Test structures for characterising the integration of EWOD and SAW technologies for microfluidics

Author

Li, Y. ; Fu, Y.Q. ; Flynn, B.W. ; Parkes, W. ; Liu, Y. ; Brodie, S. ; Terry, J.G. ; Haworth, L.I. ; Bunting, A.S. ; Stevenson, J.T.M. ; Smith, S. ; Walton, A.J.

Author_Institution

Inst. for Integrated Micro & Nano Syst. (IMNS), Univ. of Edinburgh, Edinburgh, UK

fYear

2010

fDate

22-25 March 2010

Firstpage

52

Lastpage

57

Abstract

This paper presents details of the design and fabrication of test structures specifically designed for the characterisation of two distinct digital microfluidic technologies: Electro-Wetting On Dielectric (EWOD) and Surface Acoustic Wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterise enhanced droplet manipulation as well as other integrated functions. In particular, we detail the use of EWOD to anchor droplets while SAW excitation is applied to perform mixing.

Keywords

microfluidics; surface acoustic waves; wetting; EWOD technology; SAW technology; digital microfluidic technology; electro-wetting on dielectric technology; surface acoustic wave; test structures; Acoustic testing; Acoustic waves; CMOS technology; Design engineering; Electrodes; Fingers; Integrated circuit technology; Microfluidics; Surface acoustic waves; Voltage; ElectroWetting On Dielectric (EWOD); Manipulation; Microfluidics; Mixing; Surface Acoustic Wave (SAW); Test Structures; Transportation;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on

Conference_Location

Hiroshima

Print_ISBN

978-1-4244-6912-3

Electronic_ISBN

978-1-4244-6914-7

Type

conf

DOI

10.1109/ICMTS.2010.5466861

Filename

5466861