Title :
Test structures for characterising the integration of EWOD and SAW technologies for microfluidics
Author :
Li, Y. ; Fu, Y.Q. ; Flynn, B.W. ; Parkes, W. ; Liu, Y. ; Brodie, S. ; Terry, J.G. ; Haworth, L.I. ; Bunting, A.S. ; Stevenson, J.T.M. ; Smith, S. ; Walton, A.J.
Author_Institution :
Inst. for Integrated Micro & Nano Syst. (IMNS), Univ. of Edinburgh, Edinburgh, UK
Abstract :
This paper presents details of the design and fabrication of test structures specifically designed for the characterisation of two distinct digital microfluidic technologies: Electro-Wetting On Dielectric (EWOD) and Surface Acoustic Wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterise enhanced droplet manipulation as well as other integrated functions. In particular, we detail the use of EWOD to anchor droplets while SAW excitation is applied to perform mixing.
Keywords :
microfluidics; surface acoustic waves; wetting; EWOD technology; SAW technology; digital microfluidic technology; electro-wetting on dielectric technology; surface acoustic wave; test structures; Acoustic testing; Acoustic waves; CMOS technology; Design engineering; Electrodes; Fingers; Integrated circuit technology; Microfluidics; Surface acoustic waves; Voltage; ElectroWetting On Dielectric (EWOD); Manipulation; Microfluidics; Mixing; Surface Acoustic Wave (SAW); Test Structures; Transportation;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on
Conference_Location :
Hiroshima
Print_ISBN :
978-1-4244-6912-3
Electronic_ISBN :
978-1-4244-6914-7
DOI :
10.1109/ICMTS.2010.5466861
