Title :
Semi-automatic tuning of PID gains for Atomic Force Microscopes
Author :
Abramovitch, Daniel Y. ; Hoen, Storrs ; Workman, Richard
Author_Institution :
Nanotechnol. Group at Agilent Labs., Santa Clara, CA
Abstract :
The control of a typical commercial Atomic Force Microscope (AFM) is through some variant on a Proportional, Integral, Derivative (PID) controller. Typically, the gains are hand tuned so as to keep the bandwidth of the system far below the first resonant frequency of the actuator. This paper shows a straightforward method of selecting PID gains from the actuator model so as to allow considerably higher bandwidths.
Keywords :
atomic force microscopy; physical instrumentation control; position control; three-term control; tuning; PID controller; actuator; atomic force microscope; resonant frequency; semi automatic PID tuning; Actuators; Atomic force microscopy; Bandwidth; Force control; PD control; Pi control; Proportional control; Resonant frequency; Three-term control; Tuning;
Conference_Titel :
American Control Conference, 2008
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-2078-0
Electronic_ISBN :
0743-1619
DOI :
10.1109/ACC.2008.4586898