Title :
On line diagnostics and support as a key part of process module control
Author_Institution :
KLA-Tencor, San Jose, CA, USA
Abstract :
A new method of service delivery in the semiconductor industry is required. Current equipment support implementations fail to address the requirements of the industry for both the equipment supplier and the semiconductor manufacturer. This work examines the development, impact, and direction of "e-diagnostics" as a viable, if not necessary, method of support delivery.
Keywords :
integrated circuit manufacture; integrated circuit testing; process control; IC manufacture; e-diagnostics; equipment supplier; equipment support implementations; on line diagnostics; process module control; semiconductor industry; semiconductor manufacturer; service delivery; support delivery; Costs; Electronics industry; Integrated circuit modeling; Manufacturing industries; Process control; Product safety; Production facilities; Safety devices; Semiconductor device manufacture; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Print_ISBN :
0-7803-7392-8
DOI :
10.1109/ISSM.2000.993655
