Nanometer-scale material analysis using Fourier transform mapping

Author

Ide, Takashi ; Tamegai, Haruko

Author_Institution

Anal. Technol. Dev. Div., NEC Corp., Kawasaki, Japan

fYear

2000

fDate

2000

Firstpage

265

Lastpage

268

Abstract

This paper presents a new technique for imaging material distribution based on a transmission electron micrograph. This technique, Fourier transform mapping, provides structural information of crystal with nanometer-scale resolution. This technique provides complimentary information to TEM-EDX technique, which provides microscopic information of chemical element. This technique is demonstrated by material analysis of LSI contacts. This demonstration shows the potential for Fourier transform mapping to be used as a microanalysis tool for LSI devices

Keywords

Fourier transforms; X-ray chemical analysis; integrated circuit interconnections; large scale integration; nanotechnology; transmission electron microscopy; Fourier transform mapping; LSI contacts; TEM-EDX technique; material distribution; microanalysis tool; nanometer-scale material analysis; structural information; transmission electron micrograph; Chemical analysis; Chemical elements; Crystalline materials; Fourier transforms; Insulation; Large scale integration; Lattices; Nanostructured materials; Spatial resolution; Transmission electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on

Conference_Location

Tokyo

ISSN

1523-553X

Print_ISBN

0-7803-7392-8

Type

conf

DOI

10.1109/ISSM.2000.993664

Filename

993664