A Post-CMOS Concave-Suspending MEMS Process in Standard Silicon Wafers for High-Performance Solenoidal-DNA-Configured Micro-Transformers

Author

Gu, Lei ; Li, Xinxin

Author_Institution

Shanghai Inst. of Microsyst. & Inf. Technol., Chinese Acad. of Sci., Shanghai

fYear

2006

fDate

11-13 Dec. 2006

Firstpage

1

Lastpage

4

Abstract

Solenoidal-DNA-configured transformers are fabricated in standard silicon substrate by using a post-CMOS concave-suspending MEMS process. The concavely suspended structure of the transformer effectively depresses the substrate effects including eddy current and capacitive coupling between the coil and the substrate, thereby, achieving both high Q-factor and high resonant frequency for the self-inductors. With broad useable frequency band for high mutual reactive coupling coefficient, high available gain is measured in wide frequency band for high performance radio frequency ICs

Keywords

Q-factor; eddy currents; inductors; micromechanical devices; transformers; Q-factor; capacitive coupling; eddy current; post-CMOS concave-suspending MEMS process; solenoidal-DNA-configured transformers; substrate effects; Coils; Eddy currents; Frequency measurement; Micromechanical devices; Mutual coupling; Performance gain; Q factor; Resonant frequency; Silicon; Transformers;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2006. IEDM '06. International

Conference_Location

San Francisco, CA

Print_ISBN

1-4244-0438-X

Electronic_ISBN

1-4244-0439-8

Type

conf

DOI

10.1109/IEDM.2006.346829

Filename

4154248