Title :
Autonomic information system for pre-production of modern LSIs
Author :
Ozaki, Hiroji ; Yatnana, K. ; Matsuo, Yukio ; Murakami, Tamihiro ; Yamamo, Tsuyoshi ; Morimoto, Kiyoshi ; Shigetomi, Akira
Author_Institution :
ULSI Dev. Center, Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
To realize an efficient pre-production line, we developed "Autonomic Information System for modern LSIs " (AIS). This system is combined with yield management system (YMS) and manufacturing management system (Fab Host) by using personal computers. It distributes visual information about loss-time of bottleneck equipment on production clearly and a particle map with background data for each lot and each process. By using this information system, all the concerned persons (line manager, engineers and technicians) can dissolve problems independently, appropriately and quickly like the autonomic nervous system works in the human body. "AIS" has been developing in our R&D pilot line as a loss-time reduction tool.
Keywords :
integrated circuit yield; large scale integration; management information systems; process control; production control; LSIs; autonomic information system; bottleneck equipment; loss-time; loss-time reduction tool; manufacturing management system; particle map; personal computers; pre-production; pre-production line; production; visual information; yield management system; Data visualization; Engineering management; Information systems; Large scale integration; Management information systems; Microcomputers; Modems; Production management; Research and development; Ultra large scale integration;
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Print_ISBN :
0-7803-7392-8
DOI :
10.1109/ISSM.2000.993686
