Autonomic information system for pre-production of modern LSIs

Author

Ozaki, Hiroji ; Yatnana, K. ; Matsuo, Yukio ; Murakami, Tamihiro ; Yamamo, Tsuyoshi ; Morimoto, Kiyoshi ; Shigetomi, Akira

Author_Institution

ULSI Dev. Center, Mitsubishi Electr. Corp., Hyogo, Japan

fYear

2000

fDate

2000

Firstpage

355

Lastpage

358

Abstract

To realize an efficient pre-production line, we developed "Autonomic Information System for modern LSIs " (AIS). This system is combined with yield management system (YMS) and manufacturing management system (Fab Host) by using personal computers. It distributes visual information about loss-time of bottleneck equipment on production clearly and a particle map with background data for each lot and each process. By using this information system, all the concerned persons (line manager, engineers and technicians) can dissolve problems independently, appropriately and quickly like the autonomic nervous system works in the human body. "AIS" has been developing in our R&D pilot line as a loss-time reduction tool.

Keywords

integrated circuit yield; large scale integration; management information systems; process control; production control; LSIs; autonomic information system; bottleneck equipment; loss-time; loss-time reduction tool; manufacturing management system; particle map; personal computers; pre-production; pre-production line; production; visual information; yield management system; Data visualization; Engineering management; Information systems; Large scale integration; Management information systems; Microcomputers; Modems; Production management; Research and development; Ultra large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on

ISSN

1523-553X

Print_ISBN

0-7803-7392-8

Type

conf

DOI

10.1109/ISSM.2000.993686

Filename

993686