DocumentCode
2387636
Title
Development of a new ultrasonic liquid flowmeter for very low flow rate applicable to a thin pipe
Author
Ishikawa, Hiroaki ; Takamoto, Masaki ; Shimizu, Kazuyoshi ; Monji, Hideaki ; Matsui, Goichi
Author_Institution
Nat. Res. Lab. of Metrol., Ibaraki, Japan
fYear
2000
fDate
2000
Firstpage
383
Lastpage
386
Abstract
A new ultrasonic liquid flowmeter has been developed to measure very low flow rate. This flow meter consists of small disk ultrasonic transducers and measuring pipe whose diameter is less than 1 mm. The measuring pipe passed through the ultrasonic transducer two times making the loop feature. A very low flow rate less than 1ml/min can be measured accurately and stably
Keywords
flowmeters; pipe flow; ultrasonic transducers; loop feature; measuring pipe; small disk ultrasonic transducers; thin pipe; ultrasonic liquid flowmeter; very low flow rate; Electronics industry; Fluid flow; Fluid flow measurement; Laboratories; Metrology; Pistons; Servomechanisms; Systems engineering and theory; Ultrasonic transducers; Ultrasonic variables measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Conference_Location
Tokyo
ISSN
1523-553X
Print_ISBN
0-7803-7392-8
Type
conf
DOI
10.1109/ISSM.2000.993693
Filename
993693
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