Title :
Integrated Circuits and Manufacturing - DRAM and MRAM Memory Technologies
Keywords :
CMOS technology; Capacitors; FinFETs; Integrated circuit manufacture; Integrated circuit technology; National electric code; Paper technology; Random access memory; Scalability; Voltage;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0438-X
DOI :
10.1109/IEDM.2006.346844
