Title :
Surface Acoustic Wave Motor with Flat Plane Slider
Author :
Sakano, Kouki ; Kurosawa, Minoru Kuribayashi ; Shigematsu, Takuya
Author_Institution :
Dept. of Inf. Process., Tokyo Inst. of Technol., Yokohama
Abstract :
A flat plane slider for a surface acoustic wave (SAW) motor has been enabled by using a chemically reduced lithium niobate stator. Since a slider with no projections or the flat plane slider can drive with higher preload than a slider with projections, it is expected to obtain a higher output force. In this paper, driving properties such as a no-load speed characteristic and output force characteristic of the flat plane slider was measured. The SAW motor with the flat plane slider achieved 18 N high output force and 0.9 m/s no-load speed.
Keywords :
linear motors; surface acoustic wave devices; ultrasonic motors; flat plane slider; lithium niobate stator; surface acoustic wave motor; ultrasonic linear motor; Acoustic waves; Chemicals; Friction; Lithium niobate; Micromotors; Radio frequency; Silicon; Stators; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2008. MHS 2008. International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-2918-9
Electronic_ISBN :
978-1-4244-2919-6
DOI :
10.1109/MHS.2008.4752457
