DocumentCode
2388753
Title
Surface Acoustic Wave Motor with Flat Plane Slider
Author
Sakano, Kouki ; Kurosawa, Minoru Kuribayashi ; Shigematsu, Takuya
Author_Institution
Dept. of Inf. Process., Tokyo Inst. of Technol., Yokohama
fYear
2008
fDate
6-9 Nov. 2008
Firstpage
243
Lastpage
248
Abstract
A flat plane slider for a surface acoustic wave (SAW) motor has been enabled by using a chemically reduced lithium niobate stator. Since a slider with no projections or the flat plane slider can drive with higher preload than a slider with projections, it is expected to obtain a higher output force. In this paper, driving properties such as a no-load speed characteristic and output force characteristic of the flat plane slider was measured. The SAW motor with the flat plane slider achieved 18 N high output force and 0.9 m/s no-load speed.
Keywords
linear motors; surface acoustic wave devices; ultrasonic motors; flat plane slider; lithium niobate stator; surface acoustic wave motor; ultrasonic linear motor; Acoustic waves; Chemicals; Friction; Lithium niobate; Micromotors; Radio frequency; Silicon; Stators; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science, 2008. MHS 2008. International Symposium on
Conference_Location
Nagoya
Print_ISBN
978-1-4244-2918-9
Electronic_ISBN
978-1-4244-2919-6
Type
conf
DOI
10.1109/MHS.2008.4752457
Filename
4752457
Link To Document