Title :
High-Q Micromachined Silver Passives and Filters
Author :
Rais-Zadeh, Mina ; Kohl, Paul A. ; Ayazi, Farrokh
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
This paper presents high aspect-ratio silver (Ag) micromachining for implementation of very high quality factor (Q) tunable, and fixed passives, and low insertion loss bandpass LC filters. A combination of low-loss substrate and highest conductivity metal is used to achieve record high Q and low insertion loss (IL) at radio frequencies
Keywords :
Q-factor; band-pass filters; micromachining; silver; substrates; bandpass LC filters; high aspect-ratio silver micromachining; high-Q micromachined silver passives; highest conductivity metal; low insertion loss; low-loss substrate; very high quality factor tunable filters; Band pass filters; Calibration; Capacitors; Etching; Fabrication; Inductors; Insertion loss; Polymers; Q measurement; Silver;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0439-8
Electronic_ISBN :
1-4244-0439-8
DOI :
10.1109/IEDM.2006.346889
