Title :
Novel Monolithic Integration of RF-MEMS Switch with CMOS-IC on Organic Substrate for Compact RF System
Author :
Zhang, Q.X. ; Yu, A.B. ; Yang, R. ; Li, H.Y. ; Guo, L.H. ; Liao, E.B. ; Tang, M. ; Kumar, R. ; Liu, A.Q. ; Lo, G.Q. ; Balasubramanian, N. ; Kwong, D.L.
Author_Institution :
Inst. of Microelectron., Singapore
Abstract :
A novel monolithic integration of RF MEMS switch and CMOS IC on organic substrate was demonstrated. RF MEMS switch was firstly fabricated on CMOS IC wafer, and the stacked structure was subsequently transferred onto an organic substrate (i.e., FR-4). The RF-MEMS switch illustrates significantly improved performance, while integrated together, the CMOS show preserved functionality. This technology demonstrates the feasibility and potential applicability of building high performance, compact RF system for wireless communication
Keywords :
CMOS integrated circuits; microswitches; monolithic integrated circuits; organic semiconductors; CMOS integrated circuit wafer; RF-MEMS switch; compact RF system; monolithic integration; organic substrate; wireless communication; Buildings; CMOS integrated circuits; CMOS technology; Communication switching; Monolithic integrated circuits; Radio frequency; Radiofrequency integrated circuits; Radiofrequency microelectromechanical systems; Switches; Wireless communication;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0438-X
Electronic_ISBN :
1-4244-0439-8
DOI :
10.1109/IEDM.2006.346890
