Novel Monolithic Integration of RF-MEMS Switch with CMOS-IC on Organic Substrate for Compact RF System

Author

Zhang, Q.X. ; Yu, A.B. ; Yang, R. ; Li, H.Y. ; Guo, L.H. ; Liao, E.B. ; Tang, M. ; Kumar, R. ; Liu, A.Q. ; Lo, G.Q. ; Balasubramanian, N. ; Kwong, D.L.

Author_Institution

Inst. of Microelectron., Singapore

fYear

2006

fDate

11-13 Dec. 2006

Firstpage

1

Lastpage

4

Abstract

A novel monolithic integration of RF MEMS switch and CMOS IC on organic substrate was demonstrated. RF MEMS switch was firstly fabricated on CMOS IC wafer, and the stacked structure was subsequently transferred onto an organic substrate (i.e., FR-4). The RF-MEMS switch illustrates significantly improved performance, while integrated together, the CMOS show preserved functionality. This technology demonstrates the feasibility and potential applicability of building high performance, compact RF system for wireless communication

Keywords

CMOS integrated circuits; microswitches; monolithic integrated circuits; organic semiconductors; CMOS integrated circuit wafer; RF-MEMS switch; compact RF system; monolithic integration; organic substrate; wireless communication; Buildings; CMOS integrated circuits; CMOS technology; Communication switching; Monolithic integrated circuits; Radio frequency; Radiofrequency integrated circuits; Radiofrequency microelectromechanical systems; Switches; Wireless communication;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2006. IEDM '06. International

Conference_Location

San Francisco, CA

Print_ISBN

1-4244-0438-X

Electronic_ISBN

1-4244-0439-8

Type

conf

DOI

10.1109/IEDM.2006.346890

Filename

4154309