Title :
Integrated Circuits and Manufacturing - Non Volatile Memories: NAND Flash, FRAM and PRAM
Keywords :
Electron traps; Ferroelectric films; FinFETs; Flash memory; Integrated circuit manufacture; Nonvolatile memory; Paper technology; Phase change random access memory; Random access memory; Stacking;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0438-X
DOI :
10.1109/IEDM.2006.346899