Excellent uniformity and reproducible resistance switching characteristics of doped binary metal oxides for non-volatile resistance memory applications

We have investigated various doped metal oxides such as copper doped molybdenum oxide, copper doped Al₂O₃, copper doped ZrO₂, aluminium doped ZnO, and Cu_xO for novel resistance memory applications. Compared with non-stoichiometric oxides (Nb₂O_5-x, ZrO_x, SrTiO_x), doped metal oxides show higher device yield. Moreover, Cu:MoO_x have demonstrated excellent memory characteristics such as reliability under programming cycles, potential multi-bit operation, good data retention, highly scalable property, and fast switching speed. The switching mechanism of the copper doped molybdenum oxide can be explained by the generation and rupture of multi-filaments under the electrical stress