Title :
Packaging and characterization of mechanically actuated microtweezers for biomedical applications
Author :
Wester, Brock A. ; Ross, James D. ; Rajaraman, Swami ; Allen, Mark G.
Author_Institution :
Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
This paper presents the successful design, fabrication, and packaging of a mechanically actuated micro-electro-mechanical-systems (MEMS) microtweezer, and its use in a variety of biological environments. This complete and low cost MEMS system has minimal manufacturing complexity and it can be augmented to any standard micromanipulator or positioning system. Characterization of the system shows that precise and controlled tool actuation is achieved with maximal tip closing forces of 367 mN. The system´s performance and ease of use can provide the means to create and enhance a multitude of experimental preparations previously not possible.
Keywords :
bioMEMS; biomedical equipment; electronics packaging; micromanipulators; radiation pressure; MEMS system; biomedical applications; controlled tool actuation; mechanically actuated microelectromechanical-systems microtweezer; micromanipulator; packaging; positioning system; Astrocytes; Biomedical Engineering; Cell Membrane; Electrodes; Equipment Design; Humans; Materials Testing; Micro-Electrical-Mechanical Systems; Micromanipulation; Microscopy, Electron, Scanning; Microtechnology; Neurons; Oscillometry; Spinal Cord Injuries; Time Factors;
Conference_Titel :
Engineering in Medicine and Biology Society, 2009. EMBC 2009. Annual International Conference of the IEEE
Conference_Location :
Minneapolis, MN
Print_ISBN :
978-1-4244-3296-7
Electronic_ISBN :
1557-170X
DOI :
10.1109/IEMBS.2009.5333335
