DocumentCode
2389648
Title
Highly Efficient GaN-Based LEDs with Photonic Crystals Replicated from Patterned Si Substrates
Author
Orita, Kenji ; Takase, Yuji ; Fukushima, Yasuyuki ; Usuda, Manabu ; Ueda, Tetsuzo ; Takigawa, Shin-ichi ; Tanaka, Tsuyoshi ; Ueda, Daisuke ; Egawa, Takashi
Author_Institution
Semicond. Device Res. Center, Matsushita Electr. - Panasonic, Osaka
fYear
2006
fDate
11-13 Dec. 2006
Firstpage
1
Lastpage
3
Abstract
We report on highly efficient GaN-based light emitting diodes (LEDs) with the photonic crystals (PhC) which are initially patterned on Si substrates. The PhC structures are replicated at the LED bottom by hetero-epitaxial growth and a subsequent wafer-transfer technique. Owing to the synergetic effects of the higher crystal quality obtained by lateral growth on the patterned Si substrate and the increased optical emission by PhC, resultant LEDs with the PhC achieved enhanced output power by 70% compared with that without patterned Si substrate. The present technology will open a new era of low-cost and bright blue LEDs
Keywords
III-V semiconductors; gallium compounds; light emitting diodes; photonic crystals; replica techniques; semiconductor epitaxial layers; silicon; substrates; GaN-Si; LED; hetero-epitaxial growth; increased optical emission; patterned substrates; photonic crystals; synergetic effects; wafer-transfer technique; Electrodes; Epitaxial growth; Epitaxial layers; Gallium nitride; Light emitting diodes; Optical buffering; Optical superlattices; Photonic crystals; Stimulated emission; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location
San Francisco, CA
Print_ISBN
1-4244-0439-8
Electronic_ISBN
1-4244-0439-8
Type
conf
DOI
10.1109/IEDM.2006.346913
Filename
4154348
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