Title :
Invited talk 1: Integrative MEMS/NEMS technology for micro and nano systems
Author_Institution :
Univ. of Maryland, College Park, USA
Abstract :
Materials technology and process integration are the key enabling tools for novel advances in MEMS/NEMS for future biological and chemical micro and nano systems applications. The talk presents an overview of various building block materials and process technologies.
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice, France
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752939
