• DocumentCode
    2389955
  • Title

    Invited talk 1: Integrative MEMS/NEMS technology for micro and nano systems

  • Author

    Ghodssi, Reza

  • Author_Institution
    Univ. of Maryland, College Park, USA
  • fYear
    2008
  • fDate
    9-11 April 2008
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Materials technology and process integration are the key enabling tools for novel advances in MEMS/NEMS for future biological and chemical micro and nano systems applications. The talk presents an overview of various building block materials and process technologies.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
  • Conference_Location
    Nice, France
  • Print_ISBN
    978-2-35500-006-5
  • Type

    conf

  • DOI
    10.1109/DTIP.2008.4752939
  • Filename
    4752939
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2389955