DocumentCode
2390037
Title
Mechanical fatigue on gold MEMS devices: Experimental results
Author
Pasquale, G. De ; Soma, A. ; Ballestra, A.
Author_Institution
Dept. of Mech., Polytech. of Torino, Torino
fYear
2008
fDate
9-11 April 2008
Firstpage
11
Lastpage
15
Abstract
The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by means of the pull-in voltage detections. Measurements are performed by means of the optical interferometric technique.
Keywords
fatigue testing; gold; light interferometry; mechanical strength; micromechanical devices; reliability; Au; gold MEMS devices; mechanical collapse; mechanical fatigue; mechanical strength; microsystems; optical interferometric technique; pull-in voltage; stair-case method; structural performance; Fatigue; Gold; Life estimation; Microelectromechanical devices; Monitoring; Optical interferometry; Optical losses; Performance evaluation; Testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location
Nice
Print_ISBN
978-2-35500-006-5
Type
conf
DOI
10.1109/DTIP.2008.4752942
Filename
4752942
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