DocumentCode
2390083
Title
Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface
Author
Huang, Yi-Cheng ; Lin, Mou-Sheng ; Liu, Che-Ming ; Chen, Jyh-Chen
fYear
2004
fDate
Aug. 26-31, 2004
Firstpage
793
Lastpage
798
Keywords
Atomic force microscopy; Centralized control; Chemical vapor deposition; Control system synthesis; Etching; Hysteresis; Image resolution; Nanocrystals; Scanning electron microscopy; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Mechatronics and Automation, 2004. Proceedings. 2004 International Conference on
Print_ISBN
0-7803-8748-1
Type
conf
DOI
10.1109/ICIMA.2004.1384306
Filename
1384306
Link To Document