Title :
Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface
Author :
Huang, Yi-Cheng ; Lin, Mou-Sheng ; Liu, Che-Ming ; Chen, Jyh-Chen
Keywords :
Atomic force microscopy; Centralized control; Chemical vapor deposition; Control system synthesis; Etching; Hysteresis; Image resolution; Nanocrystals; Scanning electron microscopy; Surface topography;
Conference_Titel :
Intelligent Mechatronics and Automation, 2004. Proceedings. 2004 International Conference on
Print_ISBN :
0-7803-8748-1
DOI :
10.1109/ICIMA.2004.1384306
