Title :
Flexible micro thermoelectric generator based on electroplated Bi2+xTe3−x
Author :
Schwyter, Etienne ; Glatz, Wulf ; Durrer, Lukas ; Hierold, Christofer
Author_Institution :
Dept. of Mech. & Process Eng., Micro & Nanosystems, ETH Zurich, Zurich
Abstract :
We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi2+xTe3-x thermocouples in a SU-8 mold. Demonstrator devices generate 278 muWcm-2 at DeltaTmeas=40 K across the experimental set up. Based on model calculations, a temperature difference of DeltaTG=21.4 K across the generator is assumed. Due to the flexible design and the chosen generator materials, the performance stays high even for curved contact surfaces. The measurement results correlate well with the model based design optimization predictions.
Keywords :
bismuth compounds; electroplated coatings; electroplating; microfabrication; microsensors; thermocouples; thermoelectric conversion; Bi2+xTe3-x; SU-8 mold; design optimization; electroplated thermocouples; flexible microthermoelectric generator; thermoelectric generator microfabrication; Bismuth; Contacts; Copper; Electrodes; Fabrication; Gold; Temperature; Thermal conductivity; Thermal resistance; Thermoelectricity;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752949
