Title :
Generic modeling of nonplanar dielectrics for 2 1/2D parasitic extraction
Author :
Kurt-Karsilayan, Nur
Author_Institution :
Mentor Graphics Corp., Wilsonville, OR, USA
Abstract :
Generic modeling of nonplanar dielectrics for 2 1/2D parasitic extraction is addressed. First, basic nonplanar dielectric geometry types are defined. Then it is shown that modeling complex shapes can be simplified based on the overlapping rules for most field solvers. Finally, a novel algorithm based on the overlapping assumption is introduced and the accuracy impact of modeling nonplanar dielectrics is shown based on a realistic technology. This approach is already productized and verified against various technologies along with a 2 1/2D extraction tool.
Keywords :
dielectric materials; integrated circuit interconnections; 2 1/2D parasitic extraction; generic modeling; integrated circuit interconnections; nonplanar dielectric geometry types; nonplanar dielectrics modeling; Air gaps; Conductors; Dielectrics; Geometry; Graphics; Integrated circuit modeling; Parasitic capacitance; Permittivity; Shape; Very large scale integration;
Conference_Titel :
System-on-Chip for Real-Time Applications, 2005. Proceedings. Fifth International Workshop on
Print_ISBN :
0-7695-2403-6
DOI :
10.1109/IWSOC.2005.68
