Title :
A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications
Author :
Robin, Renaud ; Touati, Samy ; Segueni, K. ; Millet, O. ; Buchaillot, Lionel
Author_Institution :
DelfMEMS SAS, Villeneuve d´Ascq
Abstract :
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4 mum) with low actuation voltage (7,5 V). This design presents also a good contact force and improves the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24 GHz applications, based on this design, has been simulated.
Keywords :
electrostatic actuators; membranes; microswitches; microwave switches; contact force; electrostatic MEMS switch; free flexible membrane; high reliability; low actuation voltage; microelectromechanical system; single pole double throw; voltage 7.5 V; Arm; Biomembranes; Electrodes; Electrostatics; Extremities; Gold; Low voltage; Microswitches; Radio frequency; Stress; RF MEMS switch; SPDT; electrostatic actuator;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752952
